Suspended Rotor Gyroscope Back EMF Speed Detection Technology

摘要：

　　Suspended rotor gyroscope has a mass with higher velocity and mass than vibrating gyroscopes,which can effectively improve the detecting precision of gyroscope.In order to overcome the drawbacks of open-loop driving mode and improve the reliability of the driving system,closed-loop driving method should be used.This paper discussed the back electromotive force (EMF) generation mechanism and detection method,through simulations and experiments,proved the applicability of back EMF detection in gyroscope.And then,suspended rotor gyroscope back-EMF speed detection circuit is designed,which made active preparations for the closed-loop drive.

关键词： Micro-electromechanical systems (MEMS) gyroscope liquid-suspended rotor back EMF speed detection

作者: Rui Weng Xiaowei Liu Haifeng Zhang

作者单位: MEMS Center, Harbin Institute of Technology, Harbin 150001, P.R.China

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-6

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）