Gap Adjustable MEMS Comb Resonator

摘要：

　　A new structure of gap adjustable MEMS resonator has been proposed,and an analytical model of the gap adjustable structure has been developed.This model is a 2D vibration system.An opposite type MATA was used to push the fixed finger structure to move,as a result,the gap between the fingers changed.Simulation results show that the displacement of the mechanical oscillator increased when the MATA provided a step force,and the vibration amplitude was modulated when the force was in a cyclical form.In order to improve the stability of the structure,the folded beams were changed into clamped beams.An FEA simulation told us that when the gap changed,the vibration amplitude increased.

关键词： Comb resonator MATA theoretical model simulation amplitude modulation

作者: Xuan Pu Weihua Li Zaifa Zhou Qingan Huang

作者单位: Key laboratory of MEMS of Ministry of education, Southeast University, Nanjing, Jiangsu, China

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-4

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）