MD Simulation of MEMS “Stiction and “Snap-back Phenomena

摘要：

　　Aiming to explain phenomena of “stiction and “snap-back,a ball-surface adhesion is simulated with molecular dynamics (MD) based on multi-body EAM potential function.Surface atoms “summon up and migrate,which lead to the phenomenon of “stiction.The migration velocity of interface atom is not consistent.Some atoms migrate too fast,which lead to the phenomenon of “snap-back.The “Snap-back phenomenon appears twice during the adhesion process.A “neck-separation phenomenon is found.The adhesive force in the separation process obviously lagged the adhesive force in the contact process,which shows there is energy loss during the adhesion process.The curve of adhesion deformation is simulated finally,and compared with relevant results.

关键词： stiction snap-back molecule dynamic neck-separation

作者: WenchaoTian Laiqiang Zhao

作者单位: School of Electro-Mechanical Engineering, Xidian University, Xi’an 710071, China

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-5

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）