Design and fabrication for dual axis silicon resonant angular rate sensor using electromagnetic excitation and electromagnetic/capacitive detection
In this paper a MEMS vibrating gyroscope is designed,fabricated and tested.Silicon bars were used for the support and vibration structures.Electromagnetic force is applied on the Au/Cr electrodes of the gyroscope to create movement in the drive mode direction.The designed the driving frequency is 5955.38Hz and the detective mode frequency is 6151.01Hz and 6591Hz,respectively.The maximum displacement of driving is 20μm.The wet etching,EB evaporation,anodic Bonding,PECVD,lift-off and ICP-RIE were used for device fabrication.The size of the mass is 1440μm×1400μm×33.6μm.And the parameter of the silicon bar is 10μm×562.5μm×33.6μm and 10μm×532.5μm×33.6μm.The size of chip was 3127μm×3069μm.For device testing,the vacuuming test equipment was set up.The tested device shows a resonance frequency for driving was 9609Hz.The model frequency of detecting structure is 9605Hz which used for electromagnetic detection.The capacitance detection need the special circuit,the experiment is carrying on.The reason of resonance frequency difference between device testing and simulation is the error of design and fabrication process.
L Biao E Masayoshi I Naokatsu T Shuji O Takahito W ying
Faculty of Engineering, Tohoku University, Aza Aoba, Aramaki, Aoba-ku, Sendai, 980,Japan
国际会议
中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)
杭州
英文
1-6
2012-11-04（万方平台首次上网日期，不代表论文的发表时间）