Electrochemical Nanofabrication Using Polyacrylamide Hydrogel as Soft Stamps

摘要：

　　The fabrication resolution of electrochemical wet stamping (E-WETS) was promoted to several hundred nanometers from several ten micrometers by using polycarylamide gel (PAG) as soft stamps and optimized processes.The PAG stamp was cured on a nanopatterned soft mold and soaked with 0.2 M KCl solution,then contact with a silicon wafer with gold film and applied electric field.And the gold nanopatterns were achieved by a selective anodic dissolution process,the diameter of fabricated gold spot was around 200 nm.The parameters affect the fabrication processes have been discussed in detail.

关键词： Nanofabrication Electrochemical etching Soft stamping Polyacrylamide hydrogel

作者: Wen Sun Hai-Tao Fan Da-Xiao Zhang Dong-Jie Hu Yong-Liang Zhou

作者单位: State Key Laboratory for Physical Chemistry of Solid Surfaces and Department of Chemistry,College of Chemistry and Chemical Engineering, Xiamen, Fujian 361005, CHINA

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-5

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）