Structural Design Of 2D Piezoresistive Micro-force Sensor

摘要：

　　In order to detect the tool-substrate contact force and the tool-target interaction force during nano-manipulation process,a novel MEMS based 2D piezoresistive micro-force sensor structure was proposed.This structure can realize the 3D hardware decoupling for the X,Y and Z axis.Thus,the force detection in the vertical direction (Z axis) and parallel direction reference to base (X axis) can be done simultaneously.Theoretical analysis shows that this structure has a good structural sensitivity.The rationality and feasibility of the structure were confirmed by simulation results.

关键词： MEMS Piezoresistive Micro-force Sensor Nano-manipulation

作者: Jie Zhou Weibin Rong Lining Sun

作者单位: State Key Laboratory of Robotics and System, Harbin Institute of Technology, Harbin, 150001,Heilongj MOE Key Laboratory of Micro-systems and Micro-structures Manufacturing, Harbin, 150080,Heilongjiang State Key Laboratory of Robotics and System, Harbin Institute of Technology, Harbin, 150001,Heilongj

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-6

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）