An Ultra-High Pressure Sensor with Autofrettaged Cylinder Structure

摘要：

　　Based on the piezoresistive effect,an ultra-high pressure sensor adopting autofrettaged cylinder structure is developed with the range of 0~1000 MPa.The sensor is mainly composed of a MEMS piezoresistive chip and the mechanical elastic element.According to the sensor’s working principle,its operating pressure range is mainly determined by the structure and material of the mechanical elastic element.In order to measure the ultra-high pressure,the mechanical elastic element is designed with autofrettaged cylinder structure and simulated by finite element method.The simulation results show that the designed autofrettaged cylinder structure can endure 1000 MPa.The MEMS piezoresistive chip is fabricated with flat diaphragm structure.The sensor is developed with the MEMS piezoresistive chip packaged on the mechanical elastic element.The experiments are carried out to evaluate the performances of the developed sensor.

关键词： Ultra-high Pressure MEMS Autofrettage Cylinder Structure

作者: Xin Guo Libo Zhao Hongyan Wang Rahman·Hebibul Chuang Chen Zhixia Qiao Yulong Zhao Zhuangde Jiang

作者单位: State Key Laboratory for Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an,710049, Shaanxi Institute of Metrology Science,Xian, Shanxi, P. R. CHINA Xinjiang Vocational & Technical College of Communications, Urumqi, 831401, P. R. China

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-8

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）