Ultrathin Micro Bowl-shaped Shell Resonant Gyroscope
Recently,the bowl-shaped gyro as a novel angle-output integral gyroscope in the micro-inertial field has been paid more attention.So far,the key technique is still how to explore the feasibility of 3D bowl-shaped shell fabrication process.Shkel with University of California Irvine has used the method of blowing Pyrex glass on silicon substrate to fabricate a whole ball shell,then adopted the strong laser to melt it down and get the bowl-shaped shell,and measured the resonant quality factor by a laser doppler vibrometer 1.
Dunzhu Xia Cheng Yu Shourong Wang Hongsheng Li
Key laboratory for Micro-inertial Instrument and Advanced Navigation Technology of Education Ministry, Southeast University, Nanjing 210096
国际会议
中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)
杭州
英文
1-2
2012-11-04（万方平台首次上网日期，不代表论文的发表时间）