DesigDesign of a Novel Four-mode Matching Tri-axis Silicon Microgyroscope

摘要：

　　A novel design of 6 DoF (Degree of Freedom) inertial device include three-axis gyro and three-axis accelerometer is proposed.To realize a real monolithic inertial sensor,a novel four-mode matching Tri-axis silicon microgyroscope structure is designed.Based on the basic tuning fork gyroscope structure,a symmetric and decoupled quadruple big proof mass are combined together with embedded small proof mass fixed by four anchors at the corners.The movement of four big proof masses supported by outside flexures is responsible for yaw detection while the movement of small proof mass supported by inner tethers is for pitch and roll detection,and the differential sensing are adopted by three channels.In simulation,four-mode matching can be realized by varying the polarization voltage on proof mass and upper polysilicon electrode.The quality factor simulation based on thermoelastic damping mechanism shows that the tri-axis gyroscope can reach high sensitivity in four modes.Finally,the fabrication process is designed by high aspect ratio combined poly and single crystal silicon (HARPSS) process in detail.

关键词： Tri-axis gyroscope four-mode matching crossing tether thermal elastic damping

作者: Dunzhu Xia Cheng Yu Shourong Wang Hongsheng Li

作者单位: Key laboratory for Micro-inertial Instrument and Advanced Navigation Technology of Education Ministry,Southeast University, Nanjing 210096

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-6

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）