Study on the Air Damping of the Movable Armature

摘要：

　　The distance of air gap is much larger than the mean free path of gas molecules for MEMS devices with small vibration.The nonlinear Reynolds equation can be transformed into linear Reynolds Eq.based on this condition and under certain assumptions.Then the mathematical model of damping of the movable armature is established with the linear Renault equation.The damping characteristics of the movable armature are studied based on the damping force mathematical model.The relation of damping coefficient and the dimensions of movable armature,the dimensions of air gap are analyzed.The research in this paper provides references for the design and analysis of the damping coefficient of the MEMS devices with small vibration.

关键词： damping movable armature MEMS

作者: Bendong Liu Jiahui Yang Yude Wu

作者单位: Beijing University of Technology, Beijing, 100124, China Beijing Vocational College of Agriculture, Beijing, 102208, China

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-6

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）