Performance comparison of typical electrothermal actuators

摘要：

　　As the power producer,the micro actuator is an important part of the micro electromechanical system,which is used as the conversion of energy,motion and force producing.In this paper,the mechanical models of three bent beam electrothermal actuators are summarized to make comparison with each other and analyze mechanical performance.For Π-shaped actuators,the tip displacements are proportional to temperature increments and lengths,having no relationship with the beam widths and thicknesses.However,the displacement of Π-shaped actuators is smaller than the one of V-shaped actuators with the same parameters.For V-shaped actuators,the tip displacements of cascaded V-shaped actuators are larger than the ones of single V-shaped actuators with the same parameters.Especially,cascaded V-shaped actuator with secondary beam having no current has the largest displacement.

关键词： MEMS Π-shaped actuator Single V-shaped actuator Cascaded V-shaped actuator

作者: ZHOU Ling SHEN Xuejin WANG Zhenlu HU Yi

作者单位: Department of Mechanical Automation Engineering, Shanghai University, Shanghai 200072, China

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-6

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）