SlidSlide Film Damping in MEMS Devices

摘要：

　　Film damping caused by microfluids has important effects on the dynamic characteristics of moving elements of MEMS devices.There are two kinds of film damping existing in MEMS devices,for instance,slide film damping and squeeze film damping,respectively.This article presents an overview on the recent progress of research on slide film damping in MEMS devices.The review discusses two kinds of damping models commonly used to study slide film damping based on the first slip velocity boundary conditions.For the convenience of quick reference in future laterally moving microstructures,adequate important equations and applicable conditions are included in this article.Finally,we proposed two unified models for the analysis and design of laterally moving micro structured devices.

关键词： Slide film damping Review MEMS Laterally moving

作者: Weidong Wang Boyuan Ma Kangqi Fan

作者单位: School of Electrical and Mechanical Engineering, Xidian University, Xi’an 710071, CHINA

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-7

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）