Micromachined Bulk Acoustic Resonator with a Raised Frame
It is the size and performance that are crucial for cell phone applications and enabling technologies that allowed both the shrinking of the early mobile handsets,while allowing more components and functionality into the slimmer phones.Bulk-Acoustic-Wave (BAW) filters have played an important part in all major mobile phone standards such as CDMA,GSM and WCDMA for their significantly small size and excellent performance.One of the most important parameters is the high Q.It will be shown that an optimum designed raised frame structure could enhance the Q and Rp efficiently.Fabrication process,theoretical study and test result analysis will be given.
bulk acoustic resonator a raised frame Q
Bin Tang Dai-Hua Zhang Hao Zhang
College of Precision Instrument and Opto-Electronics Engineering, Tianjin University, Tianjin, 300072, China
国际会议
天津
英文
19-22
2012-10-16（万方平台首次上网日期，不代表论文的发表时间）