Positioning of a MEMS Linear Motor Utilizing a Thin Film Permanent Magnet

摘要：

　　A high performance Nd2Fe14B/Ta thin film permanent magnet,which not only has a high remnant flux density and a high coercive force similar to those of a conventional sintered Nd2Fe14B magnet,but also has a high heat tolerance,was developed.Using the thin film PM,we developed a movingmagnet type MEMS linear motor consisting of a silicon slider including a multi-pole magnetized PM,a linear guideway made from Si,and two phase micro-coils.The purpose of this study is to realize feedback positioning of the MEMS linear motor.In positioning tests,the positioning resolution and bandwidth were 100 ?m and 54 Hz,respectively.

关键词： Linear motor MEMS Thin film permanent magnet Multi-pole magnetization

作者: Ryogen Fujiwara Tadahiko Shinshi Minoru Uehara Michitaka Hori Etsuo Fujiwara

作者单位: Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology, Yokoham Precision and Intelligence Laboratory, Tokyo Institute of Technology, Yokohama, Japan Magnetic Materials Research Laboratory, Hitachi Metals, Ltd., Osaka, Japan Technical Development Dept.,Nihon Denji Sokki co.,Ltd., Tokyo, Japan Graduate School of Engineering, University of Hyogo, Hyogo, Japan

会议类型: 国际会议

会议名称: 第16届机电一体化技术国际会议

会议地点: 天津

会议语种:英文

页码: 23-28

在线出版日期: 2012-10-16（万方平台首次上网日期，不代表论文的发表时间）