Design of a Micro Pump Actuator Using a Thin Film Permanent Magnet
This paper presents the design of a micro pump actuator using a thin film permanent magnet (TFPM).The TFPM is 20 μm in thickness and 3 mm in diameter.A magnetic closed circuit is designed,optimized and theoretically explained.Polydimethylsiloxane (PDMS) of about 80 μm in thickness is used as the diaphragm.Large deformation analysis is utilized for calculating the diaphragm displacement.The pump is fabricated and the actuator is evaluated.The experimental results demonstrate the effectiveness of simulated force and large deformation analysis.Furthermore,the pump flow rate and pressure are measured; a square wave signal is demonstrated to be more effective than a sinusoidal signal in generating a higher flow rate.A maximum flow rate of 50 μL/min and a maximum pressure of 110 Pa could be realized.Furthermore,the pump is proved to be bubble tolerant.
TFPM Closed magnetic circuit PDMS Large deformation analysis
Chao Zhi Tadahiko Shinshi Minoru Uehara
Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology, Yokoham Precision and Intelligence Laboratory, Tokyo Institute of Technology, Yokohama, Japan Magnetic Materials Research Laboratory, Hitachi Metals, Ltd.,Osaka, Japan
国际会议
天津
英文
29-34
2012-10-16（万方平台首次上网日期，不代表论文的发表时间）