Development of a Low-cost Focusing Probe for Edge Detection of Micro Holes
The edge detection of micro holes is difficult to achieve if the hole diameter is smaller than the probe diameter of the micro touch-trigger probe.This paper presents a non-contact probe with a blue-ray DVD pick-up head as the sensor.It is based on the focusing principle that the reflected light intensity will be maximal when the tested surface is on the focus point of the probe.When the focused beam scans across the edge of the hole,the reflected light intensity will be gradually reduced.Theoretical analysis is studied to derive the light intensity equation when the focused beam is passing through the edge.Experimental tests of the developed probe in association with a nano-positioning stage were carried out.The edge position can be obtained to the resolution of 1 nm and standard deviation of about 30 nm.This performance is beyond the diffraction limit of optical microscope.
micro hole detection blue-ray pick-up head non-contact measurement nano-positioning stage
Kuang-Chao Fan Ke Zhang You-Liang Zhang Qing Zhang
School of Instrument Science and Opto-electronic Engineering, Hefei University of Technology, Anhui, School of Instrument Science and Opto-electronic Engineering, Hefei University of Technology, Anhui,
国际会议
天津
英文
149-153
2012-10-16（万方平台首次上网日期，不代表论文的发表时间）