Lens Positioning Control by a Magnetic/Aerostatic Hybrid Actuator for Off-Axis Laser Beam Cutting
This paper describes a magnetic/aerostatic hybrid lens drive actuator to realize off-axis laser beam cutting.In off-axis cutting,the distance between the assist gas nozzle axis and the laser beam axis is rapidly and widely controlled in order to improve the capability for the removal of molten material by the assist gas jet.The proposed actuator supports a triangularshaped lens holder with three air bearings,and drives it in two translational and one rotational directions using three pairs of electromagnets.In order to realize stable positioning of the lens holder over a wide range and to cancel the inertial force working on the lens holder while the actuator body is accelerated and decelerated together with the laser cutting machine head,a combination of a partial-bias method,a variable current feedback gain method and a disturbance compensation method is proposed.Experimental results show that the prototype actuator possesses a positioning stroke of ±1 mm within 2 μm of tracking error and bandwidths of nearly 90 Hz in the controlled directions.Under acceleration conditions of ±4 G,the actuator maintains the relative displacement between the lens holder and the actuator body to within 30μm.
Laser beam cutting Off-axis Electromagnetic actuator Aerostatic bearing
Yoshihiro Morimoto Tadahiko Shinshi Takahiro Nakai Teruaki Fukuoka
Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology, Yokoham Precision and Intelligence Laboratory, Tokyo Institute of Technology, Yokohama, Japan Mitsubishi Electric Corporation, Japan
国际会议
天津
英文
173-177
2012-10-16（万方平台首次上网日期，不代表论文的发表时间）