Effect of Various Geometric Parameters of Inertial Component on Performance of Accelerometer
A inertial component of MEMS piezoresistive accelerometer was taken as the research object to investigate the influence which caused by changing of geometry parameters of its micro elastic beam to system performance.The mechanical model was built to analyze the characteristics of max stress and displacement of the inertial component when the system was sensitive to external accelery load.The theory analysis was verified by the result of FEM simulation,and the effect on structural sensitivity and natural frequency of the inertial component with changing of geometry parameters of its micro elastic beams was studied based on the conclusions above.The conclusion could be used to conduct optimization the structure design of piezoresistive accelerometer.
inertial component micro elastic beam mechanical properties geometric parameters
Jian-Hong Zhang
National key laboratory of Science and Technology on Electromechanical Dynamical Control, Beijing Institute of Technology, Beijing, China
国际会议
天津
英文
477-481
2012-10-16（万方平台首次上网日期，不代表论文的发表时间）