Repetitive Control of Piezoelectric Actuators with Fuzzy Hysteresis Compensation in Nanopositioning Applications

摘要：

　　A new repetitive control scheme with fuzzy hysteresis compensation is proposed for cancelling out the hysteresis effect of the piezoelectric actuator in periodic trajectory tracking.The repetitive controller (RC) is designed for robustness and good tracking performance.The fuzzy hysteresis compensator is developed using the inverse of the proposed novel fuzzy-systembased hysteresis model.Experiments with 50 Hz sinusoidal and triangular trajectories show that the maximum tracking errors are reduced to 58 nm and 43 nm by the proposed controller,88% and 87% less than the conventional PID controller respectively.Clearly,the experiment demonstrates the efficiency of the designed controller in nanopostioning applications.

关键词： piezoelectric actuator nanopositioning fuzzy repetitive control

作者: Peng-Zhi Li Feng Yan

作者单位: State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, China Academy of Science, Changchun,China

会议类型: 国际会议

会议名称: 第16届机电一体化技术国际会议

会议地点: 天津

会议语种:英文

页码: 533-537

在线出版日期: 2012-10-16（万方平台首次上网日期，不代表论文的发表时间）