Ultraprecision Micromachining of Micro Lens on Roll Mold Die

摘要：

　　In recent years,the demand of ultraprecision optic elements is rising with the technical development and miniaturization of information equipments.It is requested to manufacture the optic elements,like micro lens,with the technology of nanoimprint,because of high efficiency and high precision.Though the semiconductor process is used to fabricate the mold die,there are problems that it is difficult to fabricate the complex shape and to form the micro pattern on curved surface.This study aims at fabricating the roll mold die of micro lens by using ultraprecision micromachining,and examining the applicability of machined mold die.

关键词： Ultraprecision micromachining Micro lens Roll mold Imprint technology

作者: Keiichi Nakamoto Toshiki Matsuura Xinrui Tang Yoshimi Takeuchi

作者单位: Department of Mechanical Systems Engineering, Tokyo University of Agriculture and Technology, Tokyo, Department of Mechanical Engineering, Osaka University, Osaka, Japan Department of Mechanical Engineering, Chubu University, Aichi, Japan

会议类型: 国际会议

会议名称: 第16届机电一体化技术国际会议

会议地点: 天津

会议语种:英文

页码: 548-552

在线出版日期: 2012-10-16（万方平台首次上网日期，不代表论文的发表时间）