Microstructure Large Scale Surface Evaluation Based on White Light Interferometry
White light interferometry (WLI) is a kind of important technology in semiconductor industry.However,it has shortcomings when coming to measure large scale surfaces.This work presents several methods specialized for vertical and horizontal large surface evaluation: speed variable scan,nonoverlapping stitching and white light tilt scanning interferometry (TSI).Speed variable scan,which utilizes the auto focus technology to identify target surfaces,is designed to increase the vertical scanning efficiency; the nonoverlapping stitching and TSI are technologies developed based on nanomeasuring machine (NMM),which are capable of performing large horizontal measurements with more accuracy and more efficiency.The principles and the experimental results are given.
White light interferometry Speed variable Nonoverlapping stitching Tilt scanning
Long Ma Yi-Fan Niu Hong-Yan Zhang Tong Guo
Sino-European Institute of Aviation Engineering, Civil Aviation University of China, Tianjin 300300, State Key Laboratory of Precision Measuring Technology & Instruments, Tianjin University, Tianjin 30
国际会议
天津
英文
588-593
2012-10-16（万方平台首次上网日期，不代表论文的发表时间）