Fabrication of VO2 Film in the Spin-coating Way

摘要：

　　VO2 thin films were obtained from V2O5 thin film in the thermal decompose process.V2O5 thin films were prepared in the spin-coating way and with V2O5 sol-gels as raw materials fabricated by the reformative inorganic sol-gel method.The effects of the viscosity of colloid on the fabrication of V2O5 film and the thermal decomposing temperature on the fabrication of VO2 film were studied.The results show that the appropriate viscosity of colloid to obtain well-distributed V2O5 film was in the range of 30g/L-40g/L and suitable thermal decomposing temperature was about 500℃.

关键词： VO2 thin films Sol-gel Spin-coating way

作者: Guojian Jiang Shuping Yao Yunying Liu Jiayue Xu Hui Shen Min Jin Guihua Peng

作者单位: Shanghai Institute of Technology, 100 Haiquan Road, Shanghai 201418, China Shanghai Jiaotong University, 1954 Huashan Road, Shanghai 200030, China Guangxi Normal University, 15 Yucai Road, Guilin, Guangxi, 541004, China

会议类型: 国际会议

会议名称: the Chinese Materials Congress 2012(2012年中国材料大会(CMC2012))

会议地点: 太原

会议语种:英文

页码: 90-95

在线出版日期: 2012-07-13（万方平台首次上网日期，不代表论文的发表时间）