Design of Quasi-planar Ridge SOI Waveguide Resonator for Integrated Optical Gyro

摘要：

　　In order to realize the opto-electronic integration of optic gyro,the quasi-planar ridge SOI waveguide resonator is proposed due to its low loss and small bend radius.First,the single mode condition and smallest bend radius were simulated by using the 3-dimension finite difference beam propagation method (3-D BPM).Then the relationship between the sensitivity of gyro and the resonator characteristics,such as radius and coupling coefficient,was analyzed by applying the model of the integrated optical gyro.Based on these simulations,the ridge height and width of the waveguide were 220 nm and 1.2 μm respectively and the smallest bend radius was 600μm.It is shown that the theoretical detection limit of the gyro was 0.031 °/s when the resonator diameter was 5cm and the couplers splitting ratio was 46.7:53.3.This gyro system is suitable for tactical and civil applications.

关键词： Integrated optics Waveguide Resonator Gyroscope SOI Quasi-planar

作者: Kunbo Wang Lishuang Feng Zhengfang Dong

作者单位: Laboratory on Inertial Science and Technology, Beihang University, Beijing 100191, China; Key Laboratory of Micro-nano Measurement-Manipulation and Physics(Ministry of Education),Beihang University, Beijing 100191, China

会议类型: 国际会议

会议名称: the Chinese Materials Congress 2012(2012年中国材料大会(CMC2012))

会议地点: 太原

会议语种:英文

页码: 424-429

在线出版日期: 2012-07-13（万方平台首次上网日期，不代表论文的发表时间）