Research on Preparation Technology of High Quality Diamond Film

摘要：

　　The diamond films deposition experiment is carried out with MPCVD system.Some technology problems are discussed respectively,such as the substrate pretreatment,gases source compositions and deposition temperature.XRD pictures with different peaks illustrated that diamond film has good crystal orientation.A density of film crystal is observed and a thickness uniformity in detected by Scanning Electron Microscopy (SEM).The pureness of the diamond film was measured by Raman spectroscopy.The parameter coincidence rate is 90% based on the 10 prepared samples

关键词： Microwave measurement and control MPCVD High quality Diamond film

作者: Changgeng Zhou Rui Qiu Jianlin Ke Cailin Liu Bing Wang

作者单位: Institute of Nuclear Physics and Chemistry, CAEP, Mianyang, Sichuan, 621900, China Southwest University of Science and Technology , Mianyang, Sichuan, 621900, China

会议类型: 国际会议

会议名称: the Chinese Materials Congress 2012(2012年中国材料大会(CMC2012))

会议地点: 太原

会议语种:英文

页码: 392-400

在线出版日期: 2012-07-13（万方平台首次上网日期，不代表论文的发表时间）