Effect of Deposition Temperature on the Structure and Mechanical Properties of Ti-6Al-4V Film

摘要：

　　Ti-6Al-4V films were deposited by direct-current magnetron sputtering at different substrate temperatures.The structure and the surface morphology of the films were characterized by X-ray diffraction (XRD) and scanning electron microscopy (SEM).The hardness and elastic moduli of Ti-6Al-4V films were measured by nanoindentation test.The results showed that the phase direction of the films deposited at room temperature was (102) orientation,and turned to almost complete (002) preferred orientation at 300℃.For a higher temperature of 500℃,the preferred orientation of the film disappeared and presented a random grain orientation.The hardness and elastic moduli of Ti-6Al-4V films obviously showed the dependence on the temperature.The relationships among temperature,microstructure and mechanical properties of Ti-6Al-4V films were discussed in this paper.

关键词： Ti-6Al-4V films Microstructure Crystallographic orientation Mechanical properties

作者: Li Lei Lu Yafeng Li Wenxue Zeng Liying Yang Yi Hou Zhimin Han Dong

作者单位: Northwest Institute for Nonferrous Metal Research, WeiYang Road ＃96 Xian 710016, China The No.2 Process Department, China Petroleum Pipeline Engineering Corporation, HePing Road ＃146 Lang

会议类型: 国际会议

会议名称: the Chinese Materials Congress 2012(2012年中国材料大会(CMC2012))

会议地点: 太原

会议语种:英文

页码: 643-647

在线出版日期: 2012-07-13（万方平台首次上网日期，不代表论文的发表时间）