Fuzzy Fault Tree Analysis of Mask Stage

摘要：

　　Fault tree analysis (FTA) is a top-down approach for failure analysis,starting with a potential undesirable event called a TOP event,and then determining all the ways it can happen.FTA is the most commonly used technique for causal analysis in risk and reliability studies.Mask stage an important part of lithography.In this paper,Fault Tree of the mask stage is built with “Mask stage doesn’t work as the top event.Quantitative assessment and qualitative analysis based on Fuzzy Logic are carried out.And the importance of bottom events is calculated.

关键词： fuzzy fault tree mask stage membership function fuzzy number

作者: Jidong Zeng Dan Ling Yu Liu Song Wang Chuanhao Wu

作者单位: School of Mechatronics Engineering University of Electronic Science and Technology of China Chengdu, China

会议类型: 国际会议

会议名称: 2012 International Conference on Quality, Reliability, Risk, Maintenance, and Safety Engineering & The 3rd International Conference on Maintenance Engineering (2012质量,可靠性,风险,维修性及安全性工程国际会议(QR2MSE 2012 & ICME 2012))

会议地点: 成都

会议语种:英文

页码: 279-282

在线出版日期: 2012-06-15（万方平台首次上网日期，不代表论文的发表时间）