Reliability Allocation for Wafer Stage System of Lithography Based on AHP
To ensure the reliability of the wafer stage system of lithography,all factors affecting the wafer stage system reliability were analyzed.A new method based on experts grading method1 and analytic hierarchy process(AHP)2 is developed to allocate the reliability indices of wafer stage system.This approach considers not only the experience and knowledge of the expert,but also combines the Comparative Matrix of analytic hierarchy process to reduce the defect that stronger subjective factors of experts grading method.Finally,the wafer stage system of a certain lithography was taken as an example,and the reliability allocation of the system was obtained.The result indicate that the proposed method is feasible and effective.
wafer stage system reliability allocation AHP experts grading method
Mingzhang Li Yong Tang Jidong Zeng Xianlin Ren Haiqing Li
School of Mechatronics Engineering University of Electronic Science and Technology of China Chengdu, P. R. China
国际会议
成都
英文
1083-1086
2012-06-15（万方平台首次上网日期，不代表论文的发表时间）