Platinum-Indium Alloy Films Prepared by MOCVD

摘要：

Platinum-Iridium alloy films were prepared by MOCVD on Mo substrate using metal-acetylacetonate precursors. Effects of deposition conditions on composition, microstructure and mechanical properties were determined. In these experimental conditions, the purities of films are high and more than 99.0％. The films are homogeneous and monophase solid solution of Pt and Ir. Weight percentage of platinum are much higher than indium in the alloy. Lattice constant of the alloy changes with the platinum composition. Indium composition showing an up-down-up trend at the precursor temperature of 190~230℃ and the deposition temperature at 400~ 550℃. The hardness of Pt-Ir alloys prepared by MOCVD is three times more than the alloys prepared by casting.

关键词： platinum-Iridium alloy films metalorganic chemical vapor deposition deposition parameters

会议类型: 国际会议

会议名称: 5th International Conference Platinium Metals(第五届国际贵金属会议)

会议地点: 昆明

会议语种:英文

页码: 141-145

在线出版日期: 2012-10-15（万方平台首次上网日期，不代表论文的发表时间）