The Status Quo and Development Trend of High-purity Gold Sputtering Targets
This article gives a brief introduction to manufacturers and markets of sputtering targets as well as the manufacturing technology thereof. Then, it analyzes the application of high-purity gold sputtering targets in the fields of integrated circuit, information storage, flat panel display, etc. Based on the above, the article analyzes the processing development trend for the high-purity gold sputtering targets in aspects of ultra-high purity,manufacturing technology, analysis and testing technologies.
high-purity gold sputtering targets status quo development trend
YANG Anheng XIE Hongchao ZHU Yong
State Key Laboratory of Advanced Technologies for Comprehensive Utilization of Platinum Metals, Sino-Platinum Metals Co. Ltd, Kunming, 650106,China
国际会议
5th International Conference Platinium Metals(第五届国际贵金属会议)
昆明
英文
173-176
2012-10-15（万方平台首次上网日期，不代表论文的发表时间）