Embedded Automatic Focus Method for Precise Image Sampling
In the high precisely analyzing and inspecting for IC wafer image, the real-time sampling and automatic focusing of image is the key technology to guarantee acquiring sharply focused image. In this paper, a vision detecting based on embedded high-speed image sampling and automatic image focusing judgment is put forward, which includes the multitasking real-time image sampling, the precise stages control, and the management and task scheduling of automatic focus process. During the process of image sampling, FPGA and chromatic image transducer is the core of the image sampling, and to appraise the definition of the image with gray gradient judging function, compare the focusing data of mean-variance appreciation with gray level appreciation. After analyzed, the gray level focus method, which meets the need of the IC wafer micro imaging system, is obvious unimodality, with a little local peak and a low error.
Embedded System Image Sampling Automatic Focus Multitasking
Ge Li Deng Yaohua
School of Transportation and Environmental Engineering Shenzhen Institute of Information Technology School of Mechanical Engineering South China University of Technology Guangzhou, 510643, P.R.China
国际会议
南昌
英文
122-125
2012-08-26（万方平台首次上网日期，不代表论文的发表时间）