Equivalent Electrical Model for Quartz Vibrating Gyroscope
Quartz vibrating gyroscope is a kind of MEMS angular rate sensor with advantages in resolution, stability, reliability, volume, weight and cost. In order to make full use of the virtues of this MEMS sensor, chip integration for the sensor becomes necessary. As the equivalent electrical model for the sensor is a prerequisite for design of its interface ASIC, the equivalent electrical model of quartz vibrating gyroscope is presented in this work. Hybrid simulation of the sensitive components and interface circuit with HSPICE is achieved by this model to improve the yield beneficially. Simulation results show that this model can realize function verification for the quartz vibrating gyroscope.
Euqivalent electrical model quartz vibrating gyroscope ASIC
Qingyi Wang Weiping Chen Liang Yin Xiaowei Liu Zhiping Zhou
MEMS Center Harbin Institute of Technology Harbin, Heilongjiang, China
国际会议
2012 International Conference on Optoelectronics and Microelectronics(2012光电子与微电子国际学术会议 2012 ICOM)
长春
英文
501-504
2012-08-23（万方平台首次上网日期，不代表论文的发表时间）