Modeling and SIMO controlling of piezoceramic hysteresis
Micro-displacement devices, especially nano-scale actuators based on the inverse piezoelectric effect of piezoelectric ceramic are widely used. In Atomic Force Microscope (AFM) nano-level lateral resolution of probe or sample micro-displacement can be achieved using piezoelectric actuator stage. However, significant accuracy reduction is brought about by nonlinearity and multiple-value characteristics of piezoceramic hysteresis. In order to enhance the resolution of AFM system, the modeling of piezoelectric hysteresis using BP neural-network is presented in this paper based on the central symmetry characteristics, and the model parameters are gained by means of neural network training, then a Single-Input-Multiple-Output (SIMO) control method of piezoelectric ceramic is constructed. Based on the SIMO control model the open-loop tracking control experiment for piezoelectric ceramic is performed, and the tracking control error is between -47nm and 63nm. The experiment results show that the control model has the advantages of high open-loop tracking accuracy and anti-interference capability.
BP neural network piezoelectric ceramic hysteresis tracking control
Yuhe Li Yanxiang Chen Xiaogen Hu
Department of Precision Instruments and Mechanology,Tsinghua University State Key Laboratory of Precision Measurement Technology and Instruments Beijing , China
国际会议
2012 International Conference on Optoelectronics and Microelectronics(2012光电子与微电子国际学术会议 2012 ICOM)
长春
英文
529-534
2012-08-23（万方平台首次上网日期，不代表论文的发表时间）