Precision measurement of specular surfaces based on white light scanning interference
Based on a novel method that combining the phase deflectormetry technology and the white light scanning interferometry technology to realize precision measurement of specular surfaces, the design of the white light scanning interference measurement system is completed. On the basis of the thorough research of white light scanning interference measuring principle two mainly used white light peak detection algorithms are studied. Simulation experiment proving the validity of the algorithms is conducted and high measurement precision is reached. Influences of the system parameters (spectrum width and step interval), noise and the error of micro displacement on the measurement precision are analyzed. Reconstruction of 3D simulation steps varying from 10μm -0.05μm -40μm is completed.
white light scanning interference peak detection algorithms simulation experiment
Xiaojie Zhang Hongwei Zhang Shujian Han Lishuan Ji Shaohui Li
State Key Laboratory of Precision Measuring Technology & Instruments Tianjin University Tianjin, China
国际会议
2012 International Conference on Optoelectronics and Microelectronics(2012光电子与微电子国际学术会议 2012 ICOM)
长春
英文
559-564
2012-08-23（万方平台首次上网日期，不代表论文的发表时间）