MEMS Mirror Array with Crosstalk Shielding

摘要：

The design, fabrication, and quasi-static testing of a high fill factor electrostatically actuated MEMS mirror array with application to spectrometry are presented. A method for minimizing crosstalk between adjacent mirrors of the MEMS mirror array is shown using ground plane shielding and a capping structure. Mirror inclination as a function of applied voltage is shown with reference to simulated data.

关键词： Mirror Array Spectrometer MEMS Tunable Filter Wavelength Selective Switch (WSS)

作者: Steven Buswell Lawrence Lam Tiansheng Zhou

作者单位: Preciseley Microtechnology Corporation, Edmonton AB T6R 3B2, Canada

会议类型: 国际会议

会议名称: The First International Conference on Mechatronic System and Measurement Technology(第一届机电系统与测试技术国际会议 ICMSMT)

会议地点: 南京

会议语种:英文

页码: 47-50

在线出版日期: 2012-08-16（万方平台首次上网日期，不代表论文的发表时间）