A Novel Two Degree-of-freedom Ultrasonic Planar Motor Driven by Single Stator

摘要：

A novel two degree-of-freedom (DOF) ultrasonic planar motor based on traveling wave has been proposed in this paper. The stator is the key component of the planar motor. The proposed stator is in a bar type, consisting of three piezoelectric ceramic cylinders and a metal driving head. The effective elliptical motion of the driving head tip is formed by the second bending mode and the first longitude mode of the stator. The two working vibration modes are analyzed by FEM software, and the dimensions of the stator are optimized and determined via FEA. As a result of the optimization, frequencies of the two working modes are very close to 22 kHz. The major feature of the design is the multi-DOF motion achieved by a single stator.

关键词： ultrasonic motor planar motor piezoelectricity

作者: Liang Yan Yingyi Hu Hua Lan Nan Yao Zongxia Jiao I-Ming Chen

作者单位: School of Automation Science and Electrical EngineeringBeihang University, Beijing, China School of Mechanical and Aerospace Engineering Nanyang Technological University, Singapore

会议类型: 国际会议

会议名称: IEEE 10th International Conference on Industrial Informatics(第十届IEEE工业信息学国际学术会议 INDIN2012)

会议地点: 北京

会议语种:英文

页码: 550-553

在线出版日期: 2012-07-25（万方平台首次上网日期，不代表论文的发表时间）