Model Based Control of Micro-positioning Stages

摘要：

A model based control scheme for micro-positioning stage with piezoelectric actuators is proposed in this paper. In this scheme, a sandwich model with rate-dependent hysteresis is used to describe the performance of the stage. Then, a nonlinear model based control strategy is developed to enable the displacement of the stage to track the reference trajectory. Moreover, a robust design scheme is discussed. The experimental results obtained by implementing the proposed method are also presented in this paper.

关键词： positioning stage piezoelectric actuator hysteresis control sandwich model

作者: Yonghong Tan Yangqiu Xie Ruili Dong Hong He

作者单位: College of Information, Mechanical and Electrical Engineering, Shanghai Normal University, Shanghai College of Information, Mechanical and Electrical Engineering, Shanghai Normal University, Shanghai

会议类型: 国际会议

会议名称: The 31st Chinese Control Conference(第三十一届中国控制会议)

会议地点: 合肥

会议语种:英文

页码: 4378-4382

在线出版日期: 2012-07-01（万方平台首次上网日期，不代表论文的发表时间）