会议专题

Model Based Control of Micro-positioning Stages

A model based control scheme for micro-positioning stage with piezoelectric actuators is proposed in this paper. In this scheme, a sandwich model with rate-dependent hysteresis is used to describe the performance of the stage. Then, a nonlinear model based control strategy is developed to enable the displacement of the stage to track the reference trajectory. Moreover, a robust design scheme is discussed. The experimental results obtained by implementing the proposed method are also presented in this paper.

positioning stage piezoelectric actuator hysteresis control sandwich model

Yonghong Tan Yangqiu Xie Ruili Dong Hong He

College of Information, Mechanical and Electrical Engineering, Shanghai Normal University, Shanghai College of Information, Mechanical and Electrical Engineering, Shanghai Normal University, Shanghai

国际会议

The 31st Chinese Control Conference(第三十一届中国控制会议)

合肥

英文

4378-4382

2012-07-01(万方平台首次上网日期,不代表论文的发表时间)