Run-to-Run Fault Detection based on ARX Model and PCA for Semiconductor Manufacturing Processes

摘要：

This paper proposes a run-to-run(RtR ) fault detection approach for general semiconductor manufacturing processes. In this paper, a data -based model, auto-regressive with exogenous inputs (ARX ) model, will be introduced as an alternative of a mechanical model for a semiconductor manufacturing process. In this model a recursive least-squares (RLS) algorithm is proposed to identify the on-line parameter. Once the process abnormalities occurred , the fault will be detected with a statistical principal component analysis (PCA) method applied to ARX parameters. And the results will be illustrated by several simulations.

关键词： fault detection run-to-run control auto-regressive with exogenous inputs (ARX) model recursive least-squares(RLS) principal component analysis(PCA)

作者: Yan Wang Ying Zheng Cheng jie Xu

作者单位: Department of Control Science and Engineering, Huazhong University of Science and Technology, Wuhan Department of Control Science and Engineering, Huazhong University of Science and Technology,Wuhan .

会议类型: 国际会议

会议名称: The 31st Chinese Control Conference(第三十一届中国控制会议)

会议地点: 合肥

会议语种:英文

页码: 5271-5274

在线出版日期: 2012-07-01（万方平台首次上网日期，不代表论文的发表时间）