Sensing and Control of MEMS Accelerometers Using Kalman Filter
A Kalman filter is designed and implemented for a MEMS capacitive accelerometer in order to filter out two major noise sources in the accelerometer, which are electronic noise and thermal mechanical noise (Brown noise). The dynamic modeling of the MEMS accelerometer is developed. A Kalman filter based force-to-rebalance controller is constructed on the model. Simulation results show that the Kalman filter based controller produces an excellent noise reduction, increases the dynamic range of the accelerometer, and stabilizes the accelerometer system under a closed-loop structure.
MEMS accelerometer Kalman filter force-to-rebalance control electronic noise thermal mechanical noise.
Lili Dong Kai Zhang
Department of Electrical and Computer Engineering, Cleveland State University, Cleveland, OH 44115, USA
国际会议
The 24th Chinese Control and Decision Conference (第24届中国控制与决策学术年会 2012 CCDC)
太原
英文
3086-3091
2012-05-23（万方平台首次上网日期，不代表论文的发表时间）