Design and Analysis of a ZnO-quartz structured SAW Resonator at 180MHz frequency

摘要：

Theoretical models of SAW resonator were discussed and analysis. Based on them we designed key parameters of SAW resonator (SAWR) and manufactured a ZnO-quartz structured SAWR with resonant frequency at 180 MHz, Q evaluation and temperature coefficient of frequency (TCF) were taken into account because they directly decided the stability of the resonator. Further tests of the device include both computer simulation and physical measurement.

关键词： SA WR Q evaluation TCF ZnO-quartz

作者: Yinwei Chen Yi Yang Xi Liu Tianling Ren Sun Hui Yi Shu Canghai Zhang

作者单位: Institute of Microelectronics Tsinghua University Beijing, China Tsinghua National Laboratory for Information Science and Technology Tsinghua University Beijing, Chi

会议类型: 国际会议

会议名称: 2012 International Conference on Electric Technology and Civil Engineering(2012 电子技术与土木工程国际会议 ICETCE 2012)

会议地点: 三峡

会议语种:英文

页码: 1450-1453

在线出版日期: 2012-05-18（万方平台首次上网日期，不代表论文的发表时间）