Design and Calibration of a Micro Accelerometer

摘要：

A silicon-based micro machined accelerometer for vibration measurement has been developed. Sensor with the dimension of 4.5×3×0.4mm3 has been fabricated by inductively coupled plasma (ICP) etching techniques with single mask. Detection of the floating plate motion induced by acceleration is accomplished using differential capacitance measurement. The dimension of the packaged sensor is only 7.75mm. Calibration was earned out in low g and high g tests,the result indicates that the sensitivity of the sensor is measured to be 13mv/g and the micro accelerometer can be used in vibration measurement.

关键词： accelerometer design fabrication test

作者: Peng Liu

作者单位: Xian University of Technology,Xian,Shaanxi,China,710048

会议类型: 国际会议

会议名称: 2011 International Conference on Opto-Electronics Engineering and Information Science(2011光电电子工程与信息科学国际会议 ICOEIS 2011)

会议地点: 西安

会议语种:英文

页码: 69-73

在线出版日期: 2011-12-23（万方平台首次上网日期，不代表论文的发表时间）