Study on Comparison and Enhancement of Blue Luminescence of ZnO:AI Films
Al doped ZnO (ZnO.Al) thin films with oaxis preferred orientation were deposited on glass and Si substrates using radio frequency magnetron sputtering technique. The comparison of Si substrates ZnO:AI films with glass substrates ZnO: Al films and the effect of the sputtering power on the structural and optical properties of Si substrates ZnO:Al films were investigated. The microstructures and optical properties in ZnO:Al films were systematically investigated by both X-ray diffraction (XRD) and fluorescence spectrophotometery. The results showed the intensity of the blue emission band became weak and the blue centre red shifted to 449 nm when deposited on Si substrates under the same conditions. Meanwhile,the intensity of the blue emission peak first increased then decreased as the sputtering power increased from 50 W to 200 W. The most intense blue luminescence was obtained from a sample grown at 150 W.
ZnO:Al thin films Magnetron sputtering X-ray diffraction Optical properties
Haixia Chen Yingfeng Li Wenge Guo
School of Science,Xian Shiyou University,Xian,Shaanxi 710065,China Department of Electrical and Computer Engineering,Texas A&M University,College Station,Texas 77843,U
国际会议
西安
英文
258-261
2011-12-23（万方平台首次上网日期，不代表论文的发表时间）