Design of the temperature signal wireless receiver and display system on polishing interface in chemical mechanical polishing

摘要：

In this paper, the temperature signal wireless receiver and display system has been described online based on the microcontroller in chemical mechanical polishing.The system uses a low-power and high-performance AT89S52 microcontroller and a wireless transceiver module nRF24L01 to receive data.Then, the temperature is displayed through the five digitals.Besides the temperature on the polished interface in processing region can be observed online.The system presented here can provide some references for investigating the influence of the polishing interface temperature on chemical mechanical polishing process.

关键词： Chemical mechanical polishing microcontroller AT89S52 nRF24L01 temperature display

作者: Gao Hong Su Jianxiu

作者单位: Guizhou University,Guizhou,Guiyang 550025,P.R.China Henan Institute of Science and Technology,Xinxiang 453003,P. R. China

会议类型: 国际会议

会议名称: International Conference on Advances in Engineering 2011(2011年工程研究进展国际学术会议 ICAE2011)

会议地点: 南京

会议语种:英文

页码: 417-421

在线出版日期: 2011-12-17（万方平台首次上网日期，不代表论文的发表时间）