Improve Lithographic Accuracy Using Image Registration Technology

摘要：

In order to improve lithographic accuracy, an image registration method based on spatial moments is suggested in this paper. First, match the reference image and the floating one using Fourier descriptors. This step is coarse matching. Second, locate edge accurately using spatial moments method and extract corner points. Finally, match the tow images according to the corner points extracted. This step is refine match. Experimental results show that accuracy of sub-pixd edge location can reach to 0.09 pixel and that of image registration can reach to 0.1 pixel.

关键词： spatial moments subpixel edge location image redistration

作者: Qiang Wang Guohua Peng Jing Yang

作者单位: Northwestern Polytechnical University Xian, China

会议类型: 国际会议

会议名称: 2011 Fourth International Symposium on Computational Interlligence and Design 第四届计算智能与设计国际会议 ISCID 2011

会议地点: 杭州

会议语种:英文

页码: 399-402

在线出版日期: 2011-10-28（万方平台首次上网日期，不代表论文的发表时间）