Preparation of Silicon Nan Spheres by Using Electrical Discharge Machining Method

摘要：

As one of the key technologies, preparation of silicon nanospheres is very important for developing the new types of silicon based solar cells. In this paper, with the establishment of a novel electrical discharge machining (EDM) system and the raw material of heavy doped mono-crystalline silicon (0.01Q?cm), silicon nanospheres of which diameter are ranging from 25nm to 280nm have been successfully prepared by using EDM method. The micro surface topography and the elements composition are analyzed by the SEM and the EDS methods respectively. The formation mechanism of nanospheres has also been studied.

关键词： Solar cell Silicon nanospheres EDM

作者: Zhang Wei Wang Wei Hong Juan Zhang Zhiwei LiuZhengxun

作者单位: College of Mechanical and Electrical Engineering,Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China

会议类型: 国际会议

会议名称: 2011 3nd International Conference on Mechanical and Electronics Engineering(2011年第三届机械与电子工程国际会议 ICMEE2011)

会议地点: 合肥

会议语种:英文

页码: 980-983

在线出版日期: 2011-09-23（万方平台首次上网日期，不代表论文的发表时间）