Realization of Two-Axis Macro-Micro Dual-Driven System

摘要：

Macro-micro dual-driven technique is an effective method to realize motion control of longstroke and high-precision. The basic line is that micro feed stage compensates the error of macro feed stage measured by displacement sensor in order to decrease system error and improve positioning precision. This paper sets up two-axis macro-micro dual-driven system consisting of planar axis motor and piezoelectric ceramics actuator. The planar axis motor realizes coarse feed and piezoelectric ceramics compensates motion error. Flexure hinge is adopted as micro transmission mechanism to avoid noize, friction and gap. By adopting Digital Signal Processor as the controller, the compensation can be seen as synchronous. The experimental result shows the error of this system is under 200nm.

关键词： dual-driven PZT flexure hinge two-axis

作者: Fei Fang Bai Xiaolong Bingfeng Ju

作者单位: The State Key Laboratory of Fluid Power Transmission and Control, Zhejiang University,Hangzhou 310027, Peoples Republic of China

会议类型: 国际会议

会议名称: 2011 3nd International Conference on Mechanical and Electronics Engineering(2011年第三届机械与电子工程国际会议 ICMEE2011)

会议地点: 合肥

会议语种:英文

页码: 1200-1204

在线出版日期: 2011-09-23（万方平台首次上网日期，不代表论文的发表时间）