Study of Structure and Optical Properties of Magnetron Sputtered ZnS Thin Films by Annealing
Nanocrystalline ZnS thin films were deposited on glass substrates at 300W and 0.6Pa by using radio frequency magnetron sputtering, and then annealed at different temperatures. This work investigated the influence of ZnS buffer layer on different annealing temperature, analysed structural, surface topography, and optical properties of ZnS films by using X-ray diffraction (XRD), UVspectroscopy measurements and scanning electronic microscope (SEM) analysis techniques. Findings showed that the film annealed at 300°C was uniformity and compact, which was zinc blende cubic structure. The film exhibited the optical transparency as high as 85％ in the visible region, and its optical band gap was calculated to be 3.56 eV.
Magnetron sputtering ZnS thin fiims Annealing Transmittance
Ruifang Chen Jie Yu Yinqun Hua Ruili Xu Haixia Liu
School of Mechanical Engineering, Jiangsu University, Zhenjiang, Jiangsu, 212013, China School of Material Science and Engineering, Jiangsu University, Zhenjiang, Jiangsu, 212013,China
国际会议
合肥
英文
1379-1382
2011-09-23（万方平台首次上网日期，不代表论文的发表时间）