Design and Analysis of Ultra-low Speed Movement Equipment System
Czochralski lifting device is the key equipment for crystal growth. Due to laser crystal growth mechanism could decide its slow growth speed, so Lifting device is required to operate uncer the ultra-low speed situation chronically. According to shock, shake, fraction and crawl of movement system affected speed stability, the paper carries out a nobel design to laser Czochralski lifting system through alternated servo technology and its precision is analyzed comprenshensively. The long-term experimental data showed by using changed plus PID control method that the system has high precision and better reliability and it is suitable to grow largesize laser crystal. Meanwhile, the design system makes use of common spare parts and can meet the requirements for large scale industrialization.
ultra-low speed Czochralski lifting method lifting system Servo driver
Dai Feng-yan Ji Wen-gang Cao Jian-shu
Beijing Institute of Petro-chemical Technology, Beijing 102617
国际会议
合肥
英文
1475-1479
2011-09-23（万方平台首次上网日期，不代表论文的发表时间）