Research on the Properties of NiZnO Thin Films

摘要：

NiZnO thin films had been fabricated on cplane sapphire substrates using photo-assisted metal organic chemical vapour deposition system. The crystal quality of the films had been improved greatly comparing to the results in earlier reports. The crystal structure analysis indicated the NiZnO kept the basic wurtzite structure until the content of Ni attained 0.18. The crystal and electrical properties of the films showed the content of Ni had an important effect on the properties of NiZnO films.

关键词： ZnO NiZnO Electrical properties SEM

作者: Xin Dong Jin Wang Hui Wang Zhifeng Shi Long Zhao

作者单位: State Key Laboratory on Integrated Optoelectronics, Jilin University, College of Electronic Science and Engineering, Qianjin Street 2699, ChangChun 130012, Peoples Republic of China

会议类型: 国际会议

会议名称: 2011 3nd International Conference on Mechanical and Electronics Engineering(2011年第三届机械与电子工程国际会议 ICMEE2011)

会议地点: 合肥

会议语种:英文

页码: 1491-1494

在线出版日期: 2011-09-23（万方平台首次上网日期，不代表论文的发表时间）