Key Technologies Related to High Vacuum Dry Pump

摘要：

High vacuum dry pump is a typical technology-intensive mechatronics product. It is mainly composed of a specially designed gas-pumping structure and a set of very complicated electronic control system. Taking place the conventional dry pump unit, this pump can used in many hi-tech area such as semiconductor industry where oil-free high vacuum is needed. This paper introduces two types of dry pump, including their structures and performances. Some key points related to the development of the pump are intensely discussed as well.

关键词： Dry pump High vacuum pump Exhausting to atmosphere Magnetic bearings

作者: LI Jie GAN Shu Yi LIANG Ping DAI Jia Xin CHEN Da Peng ZHAO Teng

作者单位: School of Mechanical and Automotive Engineering, Hefei University of Technology, Hefei 230009, China

会议类型: 国际会议

会议名称: 2011 3nd International Conference on Mechanical and Electronics Engineering(2011年第三届机械与电子工程国际会议 ICMEE2011)

会议地点: 合肥

会议语种:英文

页码: 1696-1699

在线出版日期: 2011-09-23（万方平台首次上网日期，不代表论文的发表时间）