The Research on Key Technology of Digital Probe Instrument

摘要：

The digital probe instrument is used for measure the microwave impedance of electronic circuit, which request both the precision and resolution of 3d displacement of the probe at the level of l~2um.As there are a lot of the points to be measured, it is a high labor intensity and low efficient work when person moving and positioning the right position through high magnification microscopy only by eyes, as well as some points that should be measured are easily ignored. A double-3d displacement sliding table consists of grating digital system is proposed in the paper, which could solve the problems successfully.

关键词： Probe instrument 3d displacement Measurement Positioning

作者: ZHU Qian-ying WANG Bao-guang

作者单位: State Key Laboratory of Precision Measurement Technology and Instrument,Tianjin University, Tianjin State Key Laboratory of Precision Measurement Technology and Instrument,Tianjin University, Tianjin

会议类型: 国际会议

会议名称: 2011 3nd International Conference on Mechanical and Electronics Engineering(2011年第三届机械与电子工程国际会议 ICMEE2011)

会议地点: 合肥

会议语种:英文

页码: 2604-2607

在线出版日期: 2011-09-23（万方平台首次上网日期，不代表论文的发表时间）